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AR-P 3500 (T) Series Sensitive Positive-tone Standard Resists– MSE Supplies LLC

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AR-P 3500 (T) Series Sensitive Positive-tone Standard Resists for the Production of Integrated Circuits, 100mL/bottle - MSE Supplies LLC

AR-P 3500 (T) Series Sensitive Positive-tone Standard Resists for the Production of Integrated Circuits, 100mL/bottle

SKU: CM8101

  • $ 99995

AR-P 3500 (T) Series Sensitive Positive-tone Standard Resists for the Production of Integrated Circuits,100mL/bottle

Photoresists are in particular used in microelectronics and microsystems technologies for the fabrication of µm- and sub-µm structures. 

Features:

  • Broadband UV, i-line, g-line
  • High photosensitivity, high resolution
  • Good adhesion properties
  • 3500 T: robust processing, suitable for TMAH developer 0.26 n
  • Plasma etching resistant, temperature-stable up to 120 °C
  • Combination of novolac and naphthoquinone diazide
  • Safer Solvent PGMEA

Specifications:

SKU# CM8101 CM8102 CM8103 CM8104
Type AR-P 3510 AR-P 3510T AR-P 3540 AR-P 3540T
Layer thickness/4000rpm 2.0um 2.0um 1.4um 1.4um
Resolution 0.8um 0.6um 0.7um 0.5um
Contrast 4.0 4.5 4.5 5.0
Flash point 46℃
Package size 100mL/bottle

Note: Store at 10-18℃. Available package size: 100mL, 250mL, 1L