MSE PRO 10x10x0.5 mm 4H Semi-Insulating Type SiC, Research Grade, Silicon Carbide Crystal Substrate
SKU: WA0338
10x10x0.5 mm 4H Semi-Insulating Type SiC (0001), Research Grade, Silicon Carbide Crystal Substrate, Double Side Polished, Si face CMP polished (epi ready)
Product SKU# | WA0338 | ||||
Size |
10 mm x 10 mm (+/- 1mm) |
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Thickness |
500 um +/- 25 um (SI type) |
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Crystal Orientation |
On axis: <0001> +/- 0.5 deg for 4H-SI |
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Micropipe Density (MPD) | less than 15 cm-2 | ||||
Doping Concentration |
SI-type (V-doped): ~ 5E18/cm3 |
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Electrical Resistivity |
4H-SI |
>1E5 Ohm-cm |
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Surface Roughness |
Polish Ra 1 nm (C face, marked) |
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CMP Ra 0.5 nm (Si face) |
PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS
Property |
4H-SiC Single Crystal |
6H-SiC Single Crystal |
Lattice Parameters (Å) |
a=3.076 c=10.053 |
a=3.073 c=15.117 |
Stacking Sequence |
ABCB |
ABCACB |
Density |
3.21 |
3.21 |
Mohs Hardness |
~9.2 |
~9.2 |
Thermal Expansion Coefficient (CTE) (/K) |
4-5x10-6 |
4-5x10-6 |
Refraction Index @750nm |
no = 2.61 ne = 2.66 |
no = 2.60 ne = 2.65 |
Dielectric Constant |
c ~ 9.66 |
c ~ 9.66 |
Doping Type |
N-type or Semi-insulating |
N-type or Semi-insulating |
Thermal Conductivity (W/cm K @298K) (N-type, 0.02 ohm-cm) |
a~4.2 c~3.7 |
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Thermal Conductivity (W/cm K @298K) (Semi-insulating type) |
a~4.9 c~3.9
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a~4.6 c~3.2
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Band-gap (eV) |
3.23 |
3.02 |
Break-Down Electrical Field (V/cm) |
3-5 x 106 |
3-5 x 106 |
Saturation Drift Velocity (m/s) |
2.0 x 105 |
2.0 x 105 |
Wafer and Substrate Sizes |
Wafers: 2, 3, 4, 6 inch; smaller substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request |
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Product Grades |
A Grade Zero micropipe density (MPD 1 cm-2) B Grade Production grade (MPD 5 cm-2) C Grade Research grade (MPD 15 cm-2) D Grade Dummy grade (MPD 30 cm-2) |
Price
MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote.
Customization
Customized SiC crystal products can be made to meet customer's particular requirements and specifications.