MSE PRO 2 in Sapphire Wafer A-plane (11-20) Single Crystal Al₂O₃

Features of 2 in Sapphire Wafer A-plane (11-20) Single Crystal Al2O3

• Material: High Purity >99.996%, single crystal Al₂O₃
• Dimension: 50.8 mm +/- 0.1 mm
• Thickness: 0.50 mm standard
• Lattice Parameter: a=4.785 A, c=12.991 A
• Density: 3.98 g/cm³
• Orientation: A-plane (11-20) 0.2 +/- 0.1 degree
• Primary Flat Orientation: C-plane
• Primary flat length: 16.0 +/- 1 mm
• Total Thickness Variation: <10 um
• Bow: <10 um
• Warp: <10 um
• Thermal Expansion Coefficient: 6.66 x 10^-6 / °C parallel to C axis, 5 x 10^-6 /°C perpendicular to C axis
• Dielectric Strength: 48,000 V/cm (1,200 V/mil)
• Polishing: single side polished Ra < 0.5 nm (AFM), double size polish is available per request.