MSE PRO 6 Inch Lithium Niobate Thin Film on Insulator Wafers (LNOI) X-Cut

SKU: WA4004

$ 6,519⁹⁵

MSE PRO™ 6 Inch Lithium Niobate Thin Film on Insulator Wafers (LNOI), X-Cut

MSE Supplies offers Lithium Niobate (LiNbO₃) Thin Film (LNOI) on Insulator wafer. LNOI wafer consists of an insulating substrate with lithium niobate layer deposited on it. Lithium niobate is a versatile material with high nonlinearities and unique optical and electro-optical properties, which is widely used in photonics related applications, including modulators and many other optical communication devices. The insulating substrate provides a stable platform and reduces surface recombination, which makes it a better material than bulk lithium niobate in many ways, including smaller size and footprint (suitable for integration of miniaturized electronic devices), lower propagation loss (more efficient), higher mechanical stability and resistance to environment, etc. It is now investigated as a promising material for the development of next-generation electronic and photonic devices.

Applications:

Non-linear Optics
Electro–optics Modulators
Ferroelectric Memory Devices
Others

Specification:

General Wafer
Structure	LiNbO₃/ Oxide / Si
Diameter	Φ150 ± 0.2 mm
Thickness	675 ± 25 μm
Primary Flat Length	47.5 ± 2 mm
Wafer Beveling	R Type
TTV	< 10 μm
LTV	< 1.5 μm (5∗5 mm²) / 95%
Bow	± 50 μm
Warp	< 50 μm
Edge Trimming	2 ± 0.5 mm
Lithium Niobate Layer
Average Thickness (Can be customized between 300-600nm)	360 nm (WA4004) 600 nm (WA4005)
Orientation	X axis ± 0.5°
Primary Flat Orientation	Z axis ± 1°
Front Surface Roughness (Ra)	< 1 nm
Bond Defects	> 1 mm None ; ≦ 1 mm within 80 total
Front Surface Scratch	> 1 cm None ; ≦ 1 cm within 3 total
Oxide Layer
Thickness	4700 ± 150 nm
Uniformity	± 5%
Substrate
Material	Si
Orientation	<100> ± 1°
Primary Flat Orientation	<110> ± 1°
Resistivity	> 10 kΩ·cm
Backside	Etched