MSE PRO Titanium Sputtering Target Ti
SKU: TA8259
Description for Titanium Sputtering Target
Titanium is a material that is widely used in watches, biomedical implants, drill bits, laptops, etc. In its pure metal form, Titanium is lustrous and silvery-white in appearance. Titanium has a melting point of 1660°C, a density of 4.5 g/cc, and a vapor pressure of 10-4 Torr at 1,453°C. It is a sturdy material and can be easily fabricated when heated. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is a biocompatible material and therefore it has been used in surgical tools and medical implants. Titanium is generally evaporated in vacuum and deposited as coatings for the purposes of wear and decorative, semiconductor, and optical applications.
Customized Titanium sputtering targets are available upon request. We can custom make the Ti sputtering targets to meet customer's specific requirements and drawings.
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Name: Titanium Symbol: Ti Atomic Number: 22 Atomic Mass: 47.867 amu Melting Point: 1660.0 °C (1933.15 K, 3020.0 °F) Boiling Point: 3287.0 °C (3560.15 K, 5948.6 °F) |
Number of Protons/Electrons: 22 Number of Neutrons: 26 Color: silverish |
Titanium Sputtering Targets ( Ti target )
- Material: High purity (99.5%, 99.995%), ASTM grade 1, ASTM grade 2, TiAl6V4
- Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO 5832/2,JIS H4650,Din 17851
- Shape: Discs (Diameter <350mm), Thickness>1mm Rectangle (Length 1800mm, Width 400mm Thickness>1mm Tube ( Rotory target, OD: 20mm~160mm, Thickness: 2-20mm, Length: custom-made OD>160, Thickness >8mm, length <200)
- Application: Deposited film nitride as Decorate thin film, Deposited film oxidized to TiO2 as beam splitter or insulator
Titanium Pellet (Evaporation Material)
- Material: High purity (99.99%, 99.995%), ASTM grade 1, ASTM grade 2, TiAl6V4
- Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO 5832/2,JIS H4650,Din 17851
- Shape: Pellet, Slug
- Dimension: 3X3mm, 6X6mm, 3X8mm
Typical analysis for 99.995% Purity, Analysis by GDMS |
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Element |
ppm |
Element |
ppm |
Li |
<0.01 |
Nb |
<0.2 |
Be |
<0.005 |
Mo |
<0.5 |
B |
<0.01 |
Ru |
<0.01 |
Na |
<0.01 |
Rh |
<0.05 |
Mg |
0.05 |
Pd |
<0.01 |
Al |
0.01 |
Ag |
<0.05 |
Si |
0.21 |
Cd |
<0.05 |
P |
<0.01 |
In |
<0.05 |
S |
0.02 |
Sn |
<0.05 |
K |
<0.01 |
Sb |
<0.05 |
Ca |
<0.2 |
Te |
<0.05 |
Sc |
<0.05 |
Ba |
<0.005 |
V |
0.01 |
Ce |
<0.005 |
Cr |
0.06 |
Hf |
<0.01 |
Mn |
0.06 |
Ta |
< 2 |
Fe |
1.5 |
W |
<0.01 |
Co |
<0.01 |
Re |
<0.01 |
Ni |
0.16 |
Os |
<0.01 |
Cu |
0.2 |
Ir |
<0.01 |
Zn |
<0.05 |
Pt |
<0.05 |
Ga |
<0.05 |
Au |
<0.05 |
Ge |
<0.05 |
Hg |
<0.1 |
As |
0.02 |
Pb |
<0.01 |
Se |
<0.05 |
Bi |
<0.01 |
Zr |
<0.05 |
Th |
<0.0001 |