MSE PRO 3 inch Sapphire Wafer C-Plane Single or Double Side Polish Al₂O₃ Single Crystal

Sapphire Wafer, 3 inch, C-plane (0001), Prime Grade, Single or Double Side Polish Al2O3 Single Crystal

Customized sapphire wafers and windows are available upon request

• Product SKU#: WA0407 for single side polished, WA0406 for double side polished (600um thickness), WA0428 for double side polished (430um thickness)
• Material: High Purity >99.99% single crystal Al₂O₃
  
• Diameter: 76.2 mm +/- 0.1 mm
• Thickness: 440 um +/- 25 um (SSP) , 600 um or 430 um +/- 25 um (DSP)
• Lattice Parameters: a=4.785 A, c=12.991 A
• Density: 3.98 g/cm³
• Orientation: C plane (0001) +/- 0.3 degree, R-plane (1-102), A-plane (11-20), M-plane (10-10) are available.
• Primary flat orientation: A-plane +/- 0.3 degree
• Primary flat length: 22.0 mm +/- 1 mm
• Total Thickness Variation (TTV): <15 um
• Bow: <15 um
• Warp: <15 um
• Thermal Expansion Coefficient: 6.66 x 10^-6 / °C parallel to C axis, 5 x 10^-6 /°C perpendicular to C axis
• Dielectric Strength: 4.8 x 10⁵ V/cm
• Dielectric Constant: 11.5 (1 MHz) along C axis, 9.3 (1 MHz) perpendicular to C axis
• Dielectric Loss Tangent (a.k.a. dissipation factor): less than 1 x 10^-4
• Thermal Conductivity: 42W/(m.K) at 20℃ 
• Polishing: single side polished (SSP) front side epi-ready surface Ra < 0.5 nm (AFM), back side fine-ground Ra = 0.8 ~ 1.2 um, or double side polished (DSP) both front and back sides epi-ready surface Ra < 0.5 nm (AFM)