Specification:
General Wafer | |
SKU# | WA0533 |
Dimensions | 15 mm x 10 mm |
Thickness | 500 ± 20 μm |
XRD FWHM |
≤ 150 arcsec |
Surface Roughness | RMS ≤ 0.5 nm (10 μm × 10 μm) |
Epi Layer |
|
Material | ß-Ga2O3 |
Thickness | 250 ± 50 nm |
Uniformity |
≦ 10% |
Doping |
UID |
Substrate | |
Material | ß-Ga2O3 |
Dopant | Fe-doped |
Orientation | (010) ± 1° |
Resistivity | > 1010 ohm.cm |