MSE PRO 3 inch Sapphire Wafer C-Plane Single or Double Side Polish Al2O3 Single Crystal
SKU: WA0407
Sapphire Wafer, 3 inch, C-plane (0001), Prime Grade, Single or Double Side Polish Al2O3 Single Crystal
Customized sapphire wafers and windows are available upon request
- Product SKU#: WA0407 for single side polished, WA0406 for double side polished (600um thickness), WA0428 for double side polished (430um thickness)
- Material: High Purity >99.99% single crystal Al2O3
- Diameter: 76.2 mm +/- 0.1 mm
- Thickness: 440 um +/- 25 um (SSP) , 600 um or 430 um +/- 25 um (DSP)
- Lattice Parameters: a=4.785 A, c=12.991 A
- Density: 3.98 g/cm3
- Orientation: C plane (0001) +/- 0.3 degree, R-plane (1-102), A-plane (11-20), M-plane (10-10) are available.
- Primary flat orientation: A-plane +/- 0.3 degree
- Primary flat length: 22.0 mm +/- 1 mm
- Total Thickness Variation (TTV): <15 um
- Bow: <15 um
- Warp: <15 um
- Thermal Expansion Coefficient: 6.66 x 10-6 / °C parallel to C axis, 5 x 10-6 /°C perpendicular to C axis
- Dielectric Strength: 4.8 x 105 V/cm
- Dielectric Constant: 11.5 (1 MHz) along C axis, 9.3 (1 MHz) perpendicular to C axis
- Dielectric Loss Tangent (a.k.a. dissipation factor): less than 1 x 10-4
- Thermal Conductivity: 42W/(m.K) at 20℃
- Polishing: single side polished (SSP) front side epi-ready surface Ra < 0.5 nm (AFM), back side fine-ground Ra = 0.8 ~ 1.2 um, or double side polished (DSP) both front and back sides epi-ready surface Ra < 0.5 nm (AFM)