MSE PRO 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed
SKU: 1234
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MSE PRO 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed
SKU: MA2220
MSE PRO™ 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed
MSE PRO™ 3D Optical Surface Profilometer is a precision inspection instrument designed for measuring sub-nanometer surface details of a variety of devices and materials. It utilizes white light interferometry technology and a precise Z-direction scanning module to capture a non-contact scan of the surface and create a 3D image. The accompanying software then processes and analyzes this image to generate 2D and 3D parameters that reflect the quality of the surface, making it perfect for use in industries such as semiconductor manufacturing, 3C electronics, optical processing, nanomaterials, automotive parts, and more.
This profilometer offers unparalleled accuracy and consistency, with advanced capabilities such as environmental noise detection and precision control. Equipped with double anti-collision protection measures and a dual-channel air flotation vibration isolation system for superior performance.
Features:
- Measure roughness, step height, angles, and other contour dimensions of micro-morphology.
- Functions include automatic auto-focus, stripe finding, and brightness adjustment during measurement.
- Automatic splicing and multi-region measurement during measurement.
- Perform data processing on four modules: leveling, image retouching, denoising and filtering, and region extraction during analysis.
- Provides 5 analysis functions: roughness, geometric contour, structure, frequency, and function.
- Offers one-click and multi-file analysis functions.
Brand: MSE PRO™
Manufacturer: MSE Supplies LLC
MSE Supplies offers various optical metrology instruments. Please contact us for more information.
Specifications:
| SKU# | MA2220 | |
| Light Source | White LED | |
| Video System | 1024 x 1024 | |
| Objective Lens |
Standard:10X Optional:2.5X, 5X, 20X, 50X, 100X |
|
| Optical Zoom | Standard: 0.5X Optional: 0.375X, 0.75X, 1X |
|
| Standard Field of View | 0.98 x 0.98 mm | |
| Lens Turret | Standard: Manual 3 holes turret Optional: Motorized 5 holes turret |
|
| XY Object Table | Size | 320 x 200 mm |
| Travel range | 140 x 100 mm | |
| Load capacity | 10 kg | |
| Control method | Motorized | |
| Tilt | ±5° | |
| Z Axis | Travel Range | 100 mm |
| Control method | Motorized | |
| Z Stroke Scanning Range | 10 mm | |
| Surface Form Repeatability | 0.1 nm | |
| Roughness RMs Repeatability | 0.005 nm | |
| Step Height Measurement |
Accuracy: 0.3% Repeatability:0.08%(1σ) |
|
| Scanning Speed@0.1 nm resolution | 1.85 µm/s | |
| Reflectivity of Test object | 0.05%~100% | |
| Weight | <160 kg | |
| Size (L*W*H) | 700 x 606 x 920 mm | |
| Operating Environment | Temperature | 15°C-30°C, fluctuation <1°C/15 min |
| Humidity | 5%-95% RH, no condensation | |
| Vibration | VC-C or better | |
| Software Noise Evaluation | 3σ ≤ 4 nm | |
| Compressed Air | 0.6 Mpa oil-free, water-free, 6 mm diameter of hose | |
| Power Supply | AC100~240V, 50/60Hz, 4A, 300W | |
| Other | No strong magnetic field, No corrosive gas | |