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MSE PRO Carbon (Graphite) Sputtering Target C
SKU: TA1401
Both standard and custom-made high purity (>99.99%, trace metal basis) carbon (graphite) sputtering targets are available.
To add a Cu Backing Plate with Indium Bonding for Sputtering Targets 
Typical specifications of graphite blocks
Density: 1.8 g/cm3
Electrical resistivity: 15 uOhm.m
Impurity: <100 ppm
Porosity: 20%
Hardness HSD: 40
Bending strength: 40 MPa
Compressive strength: 60 MPa
Carbon (Graphite) (C) Properties
| Material Type | Carbon |
| Symbol | C |
| Atomic Weight | 12.0107 |
| Purity (%) | >99.99 (trace metal basis) |
| Color/Appearance | Black, Non-Metallic |
| Thermal Conductivity | 140 W/m.K |
| Melting Point (°C) | ~3,652 |
| Coefficient of Thermal Expansion | 7.1 x 10-6/K |
| Theoretical Density (g/cm3) | 2.25 |
| Z Ratio | 3.26 |
| Sputter | PDC |
| Max Power Density (Watts/Square Inch) |
80 |
| Type of Bond | Indium Bonding |
| Comments | E-beam preferred. Arc evaporation. Poor film adhesion. |
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