
MSE PRO Turbo Molecular Pump, Water cooling, Oil lubrication
SKU: VP1002
MSE PRO™ Turbo Molecular Pump, Water cooling, Oil lubrication
Product Details:
The oil lubrication turbo pumps are products of compact and high-performance offered by MSE Supplies. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application range and stable performance.
Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
The oil lubrication turbo pumps are mainly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specification:
Flange(In) | DN150 CF/ISO-K | Max. Continuous Fore-vacuum pressure(Pa) | 240 |
Flange(Out) KF | DN40 KF | Max. Fore-vacuum Pressure (Pa) | N2:350 |
Pumping Speed( L/s) | N2:600 | Gas Throughout (sccm) | N2:1200 |
He:380 | He:880 | ||
H2:240 | H2:700 | ||
Ar:580 | Ar:450 | ||
Compression Ratio | N2:109 | Rotation Speed ( rpm) | 36000 |
He:105 | Run-Up Time(min) | ≤9 | |
H2:104 | Cooling Type,Standard | Water/Air | |
Ar:109 | Cooling Water Consumption ( L/min) | ≥1 | |
Ultimate Pressure(Pa) | CF:6×10-8 | Cooling Water Temperature(℃) | ≤25 |
ISO-K:6×10-7 | Power Connection: Voltage (V AC) | 110 | |
Controller Model |
Pumping Speed 600-2000 L/s |
Max.Power Consumption (W) | ≤500 |
2.5 meter cable |
Note: You must buy a controller to use it. Controller is not included for this product.
Complementary Product:
MSE PRO Molecular Vacuum Pump Controller, Pumping Speed 600-2000 L/s E– MSE Supplies LLC