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Specifications Tantalum Sputtering Target
| Material |
Tantalum |
| Purity (trace metals basis) |
99.99% (4N) or 99.999% (5N) |
| Symbol |
Ta |
| Atomic Weight |
180.94788 |
| Atomic Number |
73 |
| Color/Appearance |
Gray Blue, Metallic |
| Thermal Conductivity |
57 W/m.K |
| Melting Point (°C) |
3,017 |
| Coefficient of Thermal Expansion |
6.5 x 10-6/K |
| Theoretical Density (g/cm3) |
16.6 |
| Z Ratio |
0.262 |
| Sputter |
DC |
Max Power Density
(Watts/Square Inch) |
100 |
| Type of Bond |
Indium, Elastomer |
| Comments |
Forms good films. Both standard and customized sizes are available. |
| Typical COA of Ta Sputtering Target |
COA of 99.999% 3" x 0.25" Ta target
(SKU# TA3802) click here to open the COA
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Product List of Tantalum Sputtering Target and Related Products
|
| Metals |
| Name |
|
Purity |
|
Tantalum Metal
|
Ta Metal
|
99.99% or 99.999%
|
|
| Alloys |
| Name |
|
Composition |
|
Aluminum Tantalum Alloy
|
AlTa Alloy
|
Al-Ta 13/87
|
|
Nickel Tantalum Alloy
|
NiTa Alloy
|
Ni-Ta 50/50
|
|
| Compounds |
|
Name
|
Formula
|
|
Tantalum Boride
|
TaB2
|
|
Tantalum Carbide
|
TaC
|
|
Tantalum Nitride
|
TaN
|
|
Tantalum Pentoxide
|
Ta2O5
|
|
Tantalum Selenide
|
TaSe2
|
|
Tantalum Silicide
|
TaSi2
|
|
Tantalum Silicide
|
Ta5Si3
|
|
Tantalum Suflfide
|
TaS2
|
|
Tantalum Telluride
|
TaTe2
|
|
