This scanning electron microscope boasts high-performance tungsten filament technology. It delivers excellent imaging quality in both high and low vacuum modes, along with a wide depth of field. Its user-friendly interface empowers users to characterize specimens and delve into the realm of microscopic imaging and analysis.
Features:
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Expandability: SEM Secondary Electrons (SE)\Backscattered Electrons (BSE)\Energy-Dispersive X-ray (EDX)\ Electron Backscatter Diffraction (EBSD), etc.
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Optical Navigation: Quickly locates targeted Region of Interest (ROI)
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Mixed Imaging (SE+BSE): Observe the specimen compositional and surface topographic information in one image
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Dual Anode (Tetrode): Dual anode emission system design provides excellent resolution under low landing energy
- Large FOV Mapping (optional): Fully automatic image stitching to map a large Field of View (FOV)
- Low Vacuum Mode (optional): Provides specimen surface morphology information in low vacuum, switchable vacuum state with one click
Specifications:
| Models |
MA1321 |
MA1322 |
| Electro-Optical Systems |
Electron Gun |
Pre-aligned Medium-sized Hairpin-type Tungsten Filament |
| Resolution |
High Vacuum |
3 nm @ 30 kV (SE)
8 nm @ 3 kV (SE)
Optional: 4 nm @ 30 kV (BSE) |
| Low Vacuum (Optional) |
3 nm @ 30 kV (SE) |
| Magnification |
1-300,000x (Film)
1-1000,000x (Screen) |
| Acceleration Voltage |
0.2 kV ~ 30 kV |
| Imaging Systems |
Detector |
Standard: Secondary Electron Detector (ETD)
Optional: Electron Backscattered Detector (EBSD), Low vacuum Secondary Electron Detector (SED), Energy Dispersive Spectrometer (EDS), etc. |
| Image Format |
TIFF, JPG, BMP, PNG |
| Vacuum System |
Vacuum Model |
High Vacuum |
Better than 5×10-4 Pa |
| Low Vacuum (Optional) |
5 ~ 1000 Pa |
| Control Mode |
Fully Automated Control |
| Turbo Molecular Pump |
>240 L/s |
| Mechanical Pump |
16m3/h |
| Specimen Chamber |
Camera |
Optical Navigation
Monitoring in the Specimen Chamber |
| Specimen Stage |
Three Axis Automatic |
Five Axis Automatic |
| Stage Range |
X: 120 mm |
X: 120 mm |
| Y: 115 mm |
Y: 115 mm |
| Z: 50 mm |
Z: 50 mm |
| / |
R: 360° |
| / |
T: -10° ~ +90° |
| Software |
Operating System |
Windows |
| Navigations |
Optical Navigation, Gesture Quick Navigation |
| Automatic Functions |
Auto Brightness & Contrast, Auto Focus, Automatic Stigmator |
| Featured Functions |
Intelligence Assisted Image Astigmatism Correction
Large-FOV Image Stitching (Optional) |
| Installation Requirements |
Size |
L≥ 3000 mm, W ≥ 4000 mm, H ≥ 2300 mm |
| Temperature |
20°C (68°F) ~ 25°C (77°F) |
| Humidity |
≤ 50 % |
| Power Supply |
AC 220 V(±10 %), 60 Hz, 2 kVA |
