MSE PRO™ Three Target lon Sputtering Coater

MSE Supplies offers a Three Target lon Sputtering Coater, which is specifically designed for the preparation of samples for coating, minimizing damage to substrate samples. It is widely used for coating non-conductive samples with materials like gold, silver, and platinum to enhance imaging quality.

Operable under low vacuum conditions, it can achieve rapid setup within 5 minutes with the use of an appropriate vacuum pump. The instrument generates minimal heat, avoiding damage to substrate samples from plasma. It provides a user-friendly experience and is easy to operate.

Three sputtering targets make it a highly versatile system capable of depositing thin films of various materials continuously.

Vacuum pump as standard accessory is included.

Brand: MSE PRO™

Manufacturer: MSE Supplies LLC

Technical Specifications

SKU#	MA0604
Vacuum Pump Set	(Oil required) Rotary Vacuum Pump
Rotary Pumping Speed	60 Hz: 9.6 m³/h (2.6 L/s)
Max Sputtering Current	30 mA
Vacuum Limit	2 Pa
Working Pressure	20-8 Pa
Vacuuming Time	< 5 Min (to 2 Pa)
Vacuum Measure	Measuring range from atmosphere to 2X10^-2mbar.
Gas Control	Gas Flow Controller
Chamber	φ165*120mm, Scratch resistant quartz glass.
Target Source (Not included)	Can only sputter noble metals: Au, Ag, Pt Target size φ50 mm*(Au: 0.1 mm/Ag: 0.5 mm/Pt: 0.1 mm)
Operation Method	Instruction Manual
Weight	52 Kg
Size, LWH	390340370 mm
Power Supply	AC 110V 60Hz
Power Consumption	< 1500 W
Warranty	One-year limited warranty with lifetime product support

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