MSE PRO 5 x 5 x 0.5 mm P Type (B-doped) Prime Grade Silicon Wafer Substrate <100>, SSP, 10-20 ohm-cm

MSE PRO™ 5 x 5 x 0.5 mm P Type (B-doped) SEMI Standard Prime Grade Silicon Wafer <100>, 10-20 ohm-cm, Single Side Polished

Product SKU#: WA0820

Product Specifications

• Material: Single Crystal Silicon Wafer Substrate
• Growth Method: MCZ
• Orientation: <100>
• Dimension: 5 x 5 mm +/- 0.1 mm
• Thickness: 525 um +/- 20 um (SSP)
• Type/ Dopant: P/ Boron
• Thermal Expansion Coefficient: 2.6·10^-6°C ^-1
• Electrical Resistivity: 10-20 ohm-cm
• Oxygen Content: 1.6 x 10^18 atoms/cm3
• Carbon Content: 0.5 ppm
• Front Surface: CMP Polished, Ra < 0.5 nm (single side polished, SSP)
• LPD & COP Particles: <=20 @ >=0.3 um size